DCA Instruments will be attending the MRS Fall Meeting in Boston, 3-5 December 2019. Visit booth #520 to find out about our latest UHV products for thin film deposition, or find out how DCA can help design unique UHV systems to achieve top-quality thin film deposition.
We look forward to meeting you there!
DCA Instruments has installed and commissioned the dual-M600 MBE system with automated transfer at The University of Sheffield. The custom-made UHV system features two M600 MBE chambers for III-V materials, a degas/preparation chamber, an analysis chamber for SIMS, and storage chamber (for up to 20 additional wafers). The automated transfer system (ATS) comprises a central distribution chamber (CDC) with a robotic arm to perform the wafer pick-up and placement. The robot is controlled by highly-sophisticated logic software that allows the user to transfer wafers to/from available chambers, as well as electronically mark wafers/holders in order to restrict access to designated chambers and avoid cross-contamination. DCA’s extensive testing of the robot transfer process ensures high accuracy and reliability. The ATS achieves significantly faster wafer processing and consequently maximises the efficiency of the system.
Ian Farrer and his team at The University of Sheffield will be using the DCA Instruments Dual-MBE System to conduct cutting-edge research into nanostructured materials (quantum dots & wires) with the aim of developing novel technology for quantum computing applications.
DCA Instruments completed the installation of an extensive UHV Multi-Chamber System at Trinity College Dublin funded by Science Foundation Ireland. The complete system offers multiple deposition techniques with rapid deposition from the two SP450 sputter chambers, controllable high-quality material deposition with the V450 molecular beam epitaxy chamber, and lastly high-precision growth with the PLD500 pulsed laser deposition chamber.
The customised sputter chambers are of particular interest as they provide unique deposition capabilities. Two target-facing as well as six confocal sputter magnetrons are available in one chamber, while the second sputter chamber features six 2″ confocal magnetrons and a magnetic coil positioned at substrate level that applies a magnetic field during growth. Furthermore, specially-designed sample manipulators not only form part of the ATS (automated transfer system) but also feature motorised z-motion to adjust the working distance, tunable substrate bias to assist with growth or perform a pre-growth wafer treatment and an oxygen-compatible heater capable of uniformly heating the wafer up to 1100oC (or 950oC in an oxygen enviroment).
The PLD500 target manipulator also features a unique-design that simultaneously rocks and rotates the selected target material to ensure uniform erosion. This allows the laser source to remain stationary and removes the need for laser rastering. The target manipulator also features linear motion to adjust the working distance as desired. The PLD500 also features; a substrate manipulator suitable for up to 2″ wafers and equipped with the same oxygen-compatible heater as the sputter chambers, a differentially pumped Torr RHEED system to allow RHEED analysis at higher pressures,
The equipment is part of the National Access Facility that allows researchers and engineers from both academia and industry to use the DCA System for materials research and technology development for novel applications.
Want to hear more about the latest results from fundamental materials and device research, technological applications and production with MBE?
The 20th European Workshop on Molecular Beam Epitaxy – EuroMBE 2019 – will be held in Lenggries, Germany, from February 17th to 20th, 2019.
DCA Instruments will be adding another reactor to the existing DCA UHV system for the Demkov Materials Physics Group at UTA in Spring 2019. The new custom-designed reactor will combine both MBE and sputtering techniques to provide precision atomic level interface control with rapid deposition rate.
Additional key features of the system include; a high-temperature heating stage with oxygen resistant heating element with motorised linear motion, gate valve isolation to allow independent pumping and bakeout for two effusion cells, and finally a mask deposition design that allow the mask and substrate holder to rotate in unison to minimise the shadow effect.
Want to hear more about the latest results from fundamental materials and device research, technological applications and production with MBE? The 34th North American Conference on Molecular Beam Epitaxy (NAMBE2018) is the place to be in, next week!
See you in Banff, Canada!
DCA Instruments will be exhibiting in the 20th International Conference on Molecular Beam Epitaxy in Shanghai. This year, the conference is organized by Shanghai Institute of Microsystems and Information Technology (SIMIT), Chinese Academy of Science. The exhibition gathers together the professionals in the field of fundamental and applied MBE research.
Come and meet us at the booth!
For more information: http://mbe2018.csp.escience.cn/
A leading provider of fiber‑optic Networking places an order for a P800 MBE Cluster Tool with automated transfer system. The system will be optimised for III-V MBE growth and includes DCA’s patented phosphorus valved cracker source with phosphorus recovery system. Additionally the Cluster Tool features a hydrogen/regrowth chamber and storage chamber.
The automated transfer system is ideally suited for production – sophisticated software provides preprogrammed sequences for each stage of the production cycle: loading, cleaning, deposition/processing, mask exchange, unloading/storage. Using these sequences, recipes can be tailored to automatically generate high-quality sample batches.
Optimised system efficiency is guaranteed with multitasking software, i.e. recipes & commands that require unrelated resources can be performed simultaneously or as soon as they become available.
DCA Instruments will be delivering a P600 MBE system to BUPT this November. The system is designed for high-quality III-V material growth. This will include DCA’s patented phosphorus valved cracker source and phosphorus recovery system.
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