DCA Instruments has installed and commissioned the dual-M600 MBE system with automated transfer at The University of Sheffield. The custom-made UHV system features two M600 MBE chambers for III-V materials, a degas/preparation chamber, an analysis chamber for SIMS, and storage chamber (for up to 20 additional wafers). The automated transfer system (ATS) comprises a central distribution […]
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Entries by Sabina Hatch
Want to hear more about the latest results from fundamental materials and device research, technological applications and production with MBE? The 20th European Workshop on Molecular Beam Epitaxy – EuroMBE 2019 – will be held in Lenggries, Germany, from February 17th to 20th, 2019.
DCA Instruments will be adding another reactor to the existing DCA UHV system for the Demkov Materials Physics Group at UTA in Spring 2019. The new custom-designed reactor will combine both MBE and sputtering techniques to provide precision atomic level interface control with rapid deposition rate. Additional key features of the system include; a high-temperature […]
A leading provider of fiber‑optic Networking places an order for a P800 MBE Cluster Tool with automated transfer system. The system will be optimised for III-V MBE growth and includes DCA’s patented phosphorus valved cracker source with phosphorus recovery system. Additionally the Cluster Tool features a hydrogen/regrowth chamber and storage chamber. The automated transfer system […]
DCA Instruments will be delivering a P600 MBE system to BUPT this November. The system is designed for high-quality III-V material growth. This will include DCA’s patented phosphorus valved cracker source and phosphorus recovery system.
DCA Instruments will supply an R450 MBE system to Tsinghua University in September 2018. The system is specially designed to deposit materials under a partial-pressure and ensure reliable and high-quality results. The R450 chamber features both effusion cells and electron beam source for co-deposition of materials.
ShanghaiTech’s first MBE system was installed by DCA Instruments this Autumn. This UHV system opens the gateway for researchers to perform high-quality material growth and develop complex structures. Three growth chambers are connected to the linear buffer line; two P600 chambers, one dedicated to III-V and the other to II-VI compounds, and an M600 chamber, […]
Helmholtz-Zentrum Berlin (HZB) for Materials and Energy selected DCA Instruments as the best option for a new MBE System. The custom-designed system will feature an R450 MBE chamber connected to a Cluster Tool Robot. This advanced capability allows users to automatically transfer of substrates between the process and storage chambers. System installation is expected in Spring […]
DCA Instruments won the competitive contract for the new Multi-MBE/Sputter deposition system at Trinity College Dublin (Ireland). This versatile and complex system is to include two R450 Sputter chambers, a pulsed laser deposition chamber (PLD 500), an R450 MBE reactor, and a Cluster Tool Robot for automated substrate transfer. System installation is expected in Spring […]
In Autumn 2017, the first of two MBE installations will take place at University of Science and Technology of China (USTC). The first part includes a P600 reactor with linear buffer chamber. The second part will see a further two reactors, an M600 and R450, as well as an Oxygen Delivery System (ODS) installed by […]
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