Dual-M600 MBE with Automated Transfer System installed at The University of Sheffield
DCA Instruments has installed and commissioned the dual-M600 MBE system with automated transfer at The University of Sheffield. The custom-made UHV system features two M600 MBE chambers for III-V materials, a degas/preparation chamber, an analysis chamber for SIMS, and storage chamber (for up to 20 additional wafers). The automated transfer system (ATS) comprises a central distribution chamber (CDC) with a robotic arm to perform the wafer pick-up and placement. The robot is controlled by highly-sophisticated logic software that allows the user to transfer wafers to/from available chambers, as well as electronically mark wafers/holders in order to restrict access to designated chambers and avoid cross-contamination. DCA’s extensive testing of the robot transfer process ensures high accuracy and reliability. The ATS achieves significantly faster wafer processing and consequently maximises the efficiency of the system.
Ian Farrer and his team at The University of Sheffield will be using the DCA Instruments Dual-MBE System to conduct cutting-edge research into nanostructured materials (quantum dots & wires) with the aim of developing novel technology for quantum computing applications.