Proven UHV technology
World Leader OF Oxide Molecular Beam Epitaxy
Ultra-High Vacuum Systems for Thin Film Deposition
At DCA Instruments, we specialize in delivering custom ultra-high vacuum (UHV) systems for thin film deposition, focusing on advancing material growth capabilities through cutting-edge technologies. Our expertise spans Molecular Beam Epitaxy (MBE), Physical Vapor Deposition / Sputtering (PVD), and Pulsed Laser Deposition (PLD).
P-Series MBE enables high-quality III-V growth with excellent uniformity, ideal for high electron-mobility applications.
M-Series MBE offers unparalleled flexibility for metal/metal-oxide deposition while maintaining high performance.
R-Series MBE is the ideal tool for oxide/chalcogenide research featuring a rapid refill system for every source.
UHV PLD / Laser MBE allows high temperature processing in atmospheric environments for small samples.
UHV Sputtering /PVD delivers faster deposition while
preservingthe materials high-quality in UHV.
Effusion cells for all low-, mid-, and high-temperature MBE processing.
Crackers / Valved sources for group-V and volatile materials (e.g. Hg).
Sputter Magnetrons with RF/DC bias for UHV applications.
Gas delivery systems encompass a wide range of applications, including Ozone, Metalorganics (e.g. TTIP), RF Atom / Plasma source, and more…
Electron Beam Sources – for demanding refractory materials.
Our clients
