Multi-MBE (P600 & M600) system installed at ShanghaiTech University

ShanghaiTech’s first MBE system was installed by DCA Instruments this Autumn. This UHV system opens the gateway for researchers to perform high-quality material growth and develop complex structures.

Three growth chambers are connected to the linear buffer line; two P600 chambers, one dedicated to III-V and the other to II-VI compounds, and an M600 chamber, that allows co-deposition from effusion cells and two e-beam sources.

A mask/carrier exchange system prevents cross-contamination between the chambers and ensures the highest quality growth possible.