DCA Instruments will supply an R450 MBE system to Tsinghua University in September 2018. The system is specially designed to deposit materials under a partial-pressure and ensure reliable and high-quality results. The R450 chamber features both effusion cells and electron beam source for co-deposition of materials.
ShanghaiTech’s first MBE system was installed by DCA Instruments this Autumn. This UHV system opens the gateway for researchers to perform high-quality material growth and develop complex structures.
Three growth chambers are connected to the linear buffer line; two P600 chambers, one dedicated to III-V and the other to II-VI compounds, and an M600 chamber, that allows co-deposition from effusion cells and two e-beam sources.
A mask/carrier exchange system prevents cross-contamination between the chambers and ensures the highest quality growth possible.
Helmholtz-Zentrum Berlin (HZB) for Materials and Energy selected DCA Instruments as the best option for a new MBE System.
The custom-designed system will feature an R450 MBE chamber connected to a Cluster Tool Robot. This advanced capability allows users to automatically transfer of substrates between the process and storage chambers.
System installation is expected in Spring 2018.
DCA Instruments won the competitive contract for the new Multi-MBE/Sputter deposition system at Trinity College Dublin (Ireland).
This versatile and complex system is to include two R450 Sputter chambers, a pulsed laser deposition chamber (PLD 500), an R450 MBE reactor, and a Cluster Tool Robot for automated substrate transfer.
System installation is expected in Spring 2018.
In Autumn 2017, the first of two MBE installations will take place at University of Science and Technology of China (USTC). The first part includes a P600 reactor with linear buffer chamber. The second part will see a further two reactors, an M600 and R450, as well as an Oxygen Delivery System (ODS) installed by the end of the year.
DCA Instruments succeeded in demonstrating its high-quality and cost-effective MBE systems and technologies was the best option for University of Sheffield (UoS). A state-of-the-art Dual-MBE Cluster Tool system with automated substrate transfer capabilities will be installed in the Spring 2018.
DCA has installed a new Hybrid MBE system at Penn State University this May. The system design facilitates the deposition of metal organic molecules and thus combines low energetic deposition techniques in a unique way, dubbed “Hybrid MBE”.
Read more
DCA Instruments Oy
Aerotie 6
FIN 20360 Turku
Finland
Tel +358 2 2382 500
Email info@dca.fi