UHV Cluster Tools with Automatic Substrate Transfer

The DCA UHV cluster tool type central distribution chamber (CDC) has been designed for automatic, computer controlled substrate transfer between the load lock and the process chambers. The circular chamber houses a UHV robot with magnetically coupled drives. The CDC is a true UHV chamber with base pressures 10-11 Torr range depending on the pumping configuration.

UHV cluster tool four 4″ substrate size.

200 mm UHV cluster tool

UHV cluster tool for 4 x 4″ molybdenum platen