Dual Filament Effusion Cell

The dual filament effusion cell features DCA’s patented flat foil filament design minimizing the temperature difference between filament and crucible.

The cell has two independent filaments – the main filament and the top filament. The top filament power can be adjusted to keep material from condensing on the crucible orifice, while keeping the main filament power at a suitable level for material evaporation.

The cell has a C-type thermocouple for temperature control. The control package includes a Eurotherm PID controller and two DC power supplies. The set up provides excellent temperature stability of 0.1 °C.

The dual filament cell is designed for continuous use up to 1400 °C temperature.

The cells are available with 6 cc, 13 cc, 23 cc, 40 cc, 60 cc, 100 cc and 200 cc volume.

Special high capacity crucible and insert sets are available for the dual filament cells. The special crucible and insert provide more volume and reduce material consumption. The insert dimensions are calculated separately for each chamber geometry, to reach excellent uniformity and improve source material utlilization.

Cell ModelFlangeWater-coolingI.V.L.O.D.
6cc DualCF3521539
13cc DualCF3521539
23cc DualCF3521539
40cc DualCF63yes215 / 29261
60cc DualCF63yes215 / 232 /29261
100cc DualCF100yes29280
100cc DualCF10029280
200cc DualCF100yes29299
200cc DualCF10029299