M800 MBE System

The M800 is a scaled up version of the widely used M600 MBE system. The growth chamber is optimized for 6″ substrate size and has ports for four single or multi-pocket e-guns and four large capacity effusion cells. An additional port is reserved for an RF atom source. The growth chamber includes internal liquid nitrogen cooled panel around the substrate area and a separate water cooling panel for the e-guns.

The load lock and buffer chamber options are described here.