Dual Chamber P600 Cluster Tool for Novel Semiconductor Nanostructure Combinations
Prof. Anna Fontcuberta i Morral’s group uses a dual chamber P600 MBE system to investigate novel semiconductor nanostructure combinations using mainly nanowires. Semiconductor nanowires represent a unique system for exploring phenomena at the nanoscale and are also expected to play a critical role in future electronic and optoelectronic devices and biochemical sensors.
The DCA MBE system at EPFL features fully automatic substrate transfer system with a UHV cluster tool, hydrogen pre-clean chamber, high temperature outgassing stage and a UHV storage chamber. Both growth chambers are equipped with solid sources for GaAs growth.