DCA wins tender for new multi-MBE system at ShanghaiTech University

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Recently founded ShanghaiTech University has selected DCA Instruments to design and manufacture their new multi-MBE system. This custom-designed system will allow multiple epitaxial growth methods and materials to be used simultaneously. Two P600 MBE chambers  and an M600 MBE chamber will be interconnected by a linear buffer chamber, which boasts an integrated mask exchange system to prevent cross-contamination between chambers.

 

P600 MBE system installed at the Shanghai Institute of Technical Physics

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DCA has completed the installation of a P600 MBE system at the Shanghai Institute of Technical Physics (SITP) of the Chinese Academy of Sciences.

The P600 is designed to grow high-quality thin films of III-V semiconductors, with a focus on phosphorous compounds. The system features a linear buffer chamber with preheating stage (950oC) for degassing and cleaning samples prior to entering the growth chamber.